Electron beam recording apparatus

Details Electron beam recording apparatus Electron beam recording apparatus

2005-03-22

2009-06-30

Huber, Paul (Department: 2627)

Dynamic information storage or retrieval

Specific detail of information handling portion of system

Radiation beam modification of or by storage medium

C369S121000

Reexamination Certificate

active

07554896

ABSTRACT:
An electron beam recording apparatus provided with control means for forming a latent image in a resist layer on a disk substrate corresponding to a predetermined pattern by controlling the irradiation position of an electron beam irradiation unit on the surface of the resist layer in accordance with the rotation angle of the disk substrate by a rotational drive unit, the shift position by a shift drive unit and the recording data that represent the predetermined pattern, and beam-adjusting means for irradiating an electron beam so as to spread over a plurality of tracks in the direction of traversing the tracks in response to the irradiation position control due to the control means, and an electron beam recording method using the apparatus.

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