Electric lamp or space discharge component or device manufacturi – Process – With testing or adjusting
Patent
1995-05-23
1996-03-05
Heinrich, Samuel M.
Electric lamp or space discharge component or device manufacturi
Process
With testing or adjusting
445 24, 445 33, H01J 918, H01J 130
Patent
active
054961998
ABSTRACT:
A first laminated sub-structure having a semiconductor substrate, a lower insulating layer on the semiconductor substrate, emitter electrodes formed in micro-apertures in the lower insulating layer and a gate electrode on the upper surface of the lower insulating layer is aligned with a second laminated sub-structure having a transparent upper insulating layer and a grid member on the transparent upper insulating layer by means of a stepper, and the first and second laminated sub-structures are fixed to each other through a field assisted glass-metal sealing technique.
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patent: 5186670 (1993-02-01), Doan et al.
patent: 5191217 (1993-03-01), Kane et al.
patent: 5430347 (1995-07-01), Kane et al.
G. Wallis et al., "Field Assisted Glass-Metal Sealing," Journal of Applied Physics, vol. 40, No. 10, Sep. 1969, pp. 3946-3949.
Makishima Hideo
Tomihari Yoshinori
Yamada Keizo
Heinrich Samuel M.
Knapp Jeffrey T.
NEC Corporation
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