Electron beam projection mask

Details Electron beam projection mask Electron beam projection mask

2005-05-03

2005-05-03

Young, Christopher G. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C430S296000, C430S942000

Reexamination Certificate

active

06887626

ABSTRACT:
The batch projection regions and of an electron beam projection mask are arranged so that pattern density may be equalized on the whole wafer surface.

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