Electron beam positive resists containing acetate polymers

Details Electron beam positive resists containing acetate polymers Electron beam positive resists containing acetate polymers

1974-12-20

1976-01-06

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 44, 96 351, 96 362, 96115R, 20415922, B05D 306

Patent

active

039314359

ABSTRACT:
Very sensitive electron beam positive resists have been obtained using films of polymeric methyl methacrylate containing acetate polymers.

REFERENCES:
patent: 3535137 (1970-10-01), Haller et al.
Levine et al., "Polymer Engineering and Science", Vol. 14, No. 7, July 1974, pp. 518-524.

Affiliated with

Also associated with

Rating

Electron beam positive resists containing acetate polymers does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron beam positive resists containing acetate polymers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron beam positive resists containing acetate polymers will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2350809