Electric heating – Metal heating – By arc
Patent
1976-12-21
1979-03-20
Truhe, J. V.
Electric heating
Metal heating
By arc
250396R, B23K 1500
Patent
active
041455975
ABSTRACT:
An electron beam lithographic system which exposes a desired area of an electron beam resist so as to form a desired pattern to be used for manufacturing large scale integrated circuits. This electron beam lithographic system provides a first and a second slit plate, respectively providing a rectangular slit so as to form an electron beam having a rectangular cross section, and a deflection means which deflects the electron beam passing the first slit so as to vary the cross section of the electron beam which passes the second slit. Therefore, electron beams having various cross sections can be obtained, so that the electron beam resist is exposed by the beam having various cross sections and the desired pattern can be formed within a short time on a wafer.
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patent: 3956635 (1976-05-01), Chang
H. C. Pfeiffer, "New Imaging & Deflection Concept for Probe-Forming Microfabrication Systems", Journal of Vacuum Science Technology, vol. 12, No. 8, 11/12/1975.
Fujitsu Limited
Shaw Clifford C.
Truhe J. V.
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