Electron beam line evaporator

Details Electron beam line evaporator Electron beam line evaporator

1987-04-13

1988-10-18

Albritton, C. L.

Electric heating

Metal heating

By arc

373 14, 373 13, B23K 1500

Patent

active

047789743

ABSTRACT:
An electron beam line evaporator for coating heat-sensitive strips or substrates includes a magnetic trap overlying an evaporation crucible to prevent unpermissible heating and static electrification by back-scattered electrons, complemented with means to influence the injection angle of a dynamically deflected electron beam in such a manner that the beam enters the horizontal magnetic field of the trap at the same angle in each deflection phase independent of stray fields. Such means are arranged inside a gap of a pole shoe necessary for the horizontal magnetic field used by the trap and are operative to generate a vertical magnetic field variable in time and locally alongside the pole shoe.

REFERENCES:
patent: 4524717 (1985-06-01), Neumann et al.
patent: 4532888 (1985-08-01), Neumann et al.

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