Electron beam lens for micro-column electron beam apparatus...

Details Electron beam lens for micro-column electron beam apparatus... Electron beam lens for micro-column electron beam apparatus...

2006-02-14

2006-02-14

Nguyen, Kiet T. (Department: 2881)

Metal working

Method of mechanical manufacture

Electrical device making

C445S046000

Reexamination Certificate

active

06996896

ABSTRACT:
Provided is an electron beam lens for a micro-column electron beam apparatus and a method of manufacturing the same. A photosensitive glass substrate is used as a base isolation substrate and a thin metal film is grown by a plating method. Holes through which electron beam passes are formed by a lift off method after forming a resist pattern shaped as a hole on a seed metal layer and plating the thin metal film.

REFERENCES:
patent: 5444256 (1995-08-01), Nagai et al.
patent: 5535508 (1996-07-01), Nagai et al.
patent: 5731228 (1998-03-01), Endo et al.
J. Vac. Sci. Technol. B 12(b) Nov/Dec 1994, pp. 3425-3430.

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