Electron beam irradiation of gases and light source using the sa

Details Electron beam irradiation of gases and light source using the sa Electron beam irradiation of gases and light source using the sa

1997-06-12

2000-04-18

Davie, James W.

Coherent light generators

Particular pumping means

Pumping with optical or radiant energy

372 57, H01S 30959, H01S 3225

Patent

active

060524014

ABSTRACT:
Excimers are generated by directing an electron beam at about 5 KeV to about 40 KeV into an excimer forming gas such as He, Ne, Ar, Kr, and Xe or mixtures of these with other gases through a ceramic foil such as SiN.sub.x. Vacuum ultraviolet (VUV) light is emitted by the excimers or by other species in contact therewith. The invention can provide intense, continuously operable broadband or monochromatic VUV light sources.

REFERENCES:
patent: 4203078 (1980-05-01), Daugherty et al.
patent: 4230994 (1980-10-01), Bradley
patent: 4238742 (1980-12-01), Champagne
patent: 4494036 (1985-01-01), Neukermans
patent: 4591756 (1986-05-01), Avnery
patent: 4599730 (1986-07-01), Eden et al.
Robert et al., Energetic High Repetition Rate Flash X-Ray Source: Application to UV-VUV Fluorescense Studies in High Pressure Gases, pp. 237-244, International Conference on Phenomena in Ionized Gases, Sep. 19-24, 1993.
Ulrich et al., Heavy-ion excitation of rare-gas excimers, J. Appl. Phys. 62(2), Jul. 15, 1987, .COPYRGT.1987 American Institute of Physics, pp. 357-361.
Sauerbrey, R. et al., Fluorescence and absorption in electron beam excited argon, J. Phys. B: At. Mol. Phys. 17 (1984), .COPYRGT. 1984 The Institute of Physics, pp. 2057-2074. (No Month).
Kogelschatz, Silent-discharge driven excimer UV sources and their applications, Applied Surface Science 54 (1992), .COPYRGT.1992 Elsevier Science Publishers B.V., pp. 410-423. (No Month).
Hanlon et al., Electron window cathode ray tube applications, J. Vac. Sci. Technol. B 4(1), Jan./Feb. 1986, .COPYRGT.1986 American Vacuum Society, pp. 305-309.
Anuchin, et al., Efficiency of pumping of gaseous media by fission fragments, Sov. Tech. Phys. Lett. 18(3), Mar. 1992, .COPYRGT.1992 American Institute of Physics, pp. 164-165.
Dube' et al., Supersonic cooling of rare-gas excimers excited in dc discharges, Dec. 1, 1991, Vo. 16, No. 23, Optics Letters, .COPYRGT.1991 Optical Society of America, pp. 1887-1889.
Kern et al., Thin Film Processes: Chemical Vapor Deposition of Inorganic Thin Films, .COPYRGT.1978 by Academic Press, Inc., pp. 257-258 and pp. 298-301. (No Month).
Brochure, Heraeus Excimer UV Lamps, The Source of Innovation! A Quantum Step Forward in UV Technology, pp. 1-10. (No Date).
Wieser et al., Vacuum ultraviolet rare gas excimer light source, Rev. Sci. Instrum. 68 (3), Mar. 1997, .COPYRGT.1997 American Institute of Physics, pp. 1360-1364.

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