Electron beam irradiation device and method of manufacturing an

Details Electron beam irradiation device and method of manufacturing an Electron beam irradiation device and method of manufacturing an

1991-10-15

1993-05-11

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

2505031, 313420, 21912121, H01J 3304

Patent

active

052104265

ABSTRACT:
This invention provides an electron beam irradiation device employing a material containing a Ti-A1 intermetallic composite as the material of an electron beam permeable window for allowing passage to the outside of a chamber of an electron beam generated in the chamber. Also, this invention provides a method of manufacturing an electron beam permeable window containing a Ti-A1 intermetallic composite by manufacturing a window-frame mounted titanium foil by fixing titanium foil between an outer window frame and an inner window frame of an electron beam permeable window, coating this with aluminium and titanium by converting aluminium and titanium to a metallic vapor state and subjecting this to thermal diffusion treatment.

REFERENCES:
patent: 4324980 (1982-04-01), Symmons
patent: 4362965 (1982-12-01), Kendall
patent: 4446373 (1984-05-01), Denholm et al.
patent: 4591756 (1986-05-01), Avnery
patent: 4642467 (1987-02-01), Yamawaki et al.
Kazuo Kasahara et al, "Oxidation Behavior of Intermetallic Compounds TiAl at High Temperatures", J. Japan Inst. Metals, vol. 53, No. 1 (1989). pp. 58-62.
Keita Kawamura et al., "Treatment of Exhaust Gases by Electron Beam Irradiation", vol. 20, No. 5 (1978).

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