Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2007-04-17
2007-04-17
Wells, Nikita (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S306000, C369S101000, C428S064400
Reexamination Certificate
active
11335950
ABSTRACT:
Disclosed are an electron beam irradiation apparatus and an electron beam irradiation method that are capable of easily curing a material that is hard to be cured by irradiation of ultraviolet rays and of reducing the number of electron beam irradiation tubes. The electron beam irradiation apparatus has a motor for rotationally driving an irradiation target object, a shield container for rotatably accommodating the irradiation target object, and an electron beam irradiation unit provided in the shield container so that the surface of the irradiation target object is irradiated with electron beams, wherein the electron beam irradiation unit and the irradiation target object are relatively moved when the electron beam irradiation unit irradiates the surface of the irradiation target object with the electron beams during a rotation of the irradiation target object.
REFERENCES:
patent: 20904-110967 (2004-04-01), None
patent: 2004-212100 (2004-07-01), None
Patent Abstracts of Japan for JP04-019839 published on Jan. 23, 1992.
Patent Abstracts of Japan for JP11-162015 published on Jun. 18, 1999.
Patent Abstracts of Japan for JP07-292470 published on Nov. 7, 1995.
Patent Abstracts of Japan for JP2000-064042 published on Feb. 29, 2000.
Patent Abstracts of Japan for JP2004-110967 published on Apr. 8, 2004.
Patent Abstracts of Japan for JP2004-212100 published on Jul. 29, 2004.
Tanaka Kazushi
Usami Mamoru
Yoneyama Kenji
Darby & Darby
Hashmi Zia R.
TDK Corporation
Wells Nikita
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