Electron beam integrated circuit tester

Details Electron beam integrated circuit tester Electron beam integrated circuit tester

1986-06-30

1988-10-18

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

250298, 250299, 250310, 250397, H01J 37147, H01J 37153, H01J 3726, G01R 3126

Patent

active

047790466

ABSTRACT:
An electric beam integrated circuit tester including a source of primary electrons, a support for the integrated circuit, and an electronic column fixed above the support for the integrated circuit for focusing the primary electron beam emitted at the surface of the circuit on the points of the circuit to be tested. It also includes an accelerator of the secondary electrons emitted by the integrated circuit in a direction colinear and opposite that of the primary electron beam, a separator with three pole pieces for directing out of the column the beam of secondary electrons accelerated by the accelerator and an energy spectrometer coupled to the separator and fixed to the outside of the column for analyzing, depending on their energy, the electrons of the beam of secondary electrons emitted separately by the separator.

REFERENCES:
patent: 4426577 (1984-01-01), Koike et al.
patent: 4514638 (1985-04-01), Lischke et al.

Affiliated with

Also associated with

Rating

Electron beam integrated circuit tester does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron beam integrated circuit tester, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron beam integrated circuit tester will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1196992