Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2008-07-24
2011-12-27
Patel, Kanjibhai (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S274000, C250S311000
Reexamination Certificate
active
08086022
ABSTRACT:
An inspection system uses a scanning electron microscope that detects a high-precision electron beam image, and at the same time removes restrictions for a low sampling rate. A sampled signal is obtained by sampling an analog brightness signal generated by a secondary electron detector at a predetermined sampling rate, and contiguous digital values contained in the sampled signal are added on an N by N digital value basis to generate a digital brightness signal whose frequency is equal to 1/N of the sampling frequency. Each, digital value contained in the digital brightness signal is divided by N to generate a digital signal made of digital values having a number of bits equal to that of the sampled signal and to generate an image signal in which each digital value of the digital signal forms one pixel data.
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Japanese Office Action dated Mar. 2, 2010 Three (3) pages.
Editor: No. 132 Committee of Japan Society for the Promotion of Science, “Electron/Ion Beam Handbook”, 2nded., The Nikkan Kogyo Shimbun. Ltd., 1986, pp. 622-623; including English translation of relevant portions.
Japanese Office Action dated Dec. 8, 2009 Three (3) pages.
Gunji Yasuhiro
Miyai Hiroshi
Ominami Yusuke
Crowell & Moring LLP
Hitachi High-Technologies Corporation
Patel Kanjibhai
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