Electron beam gun

Details Electron beam gun Electron beam gun

1997-08-12

2000-04-18

Patel, Ashok

Electric lamp and discharge devices

Discharge devices having three or more electrodes

Discharge control electrode

313446, 313452, 313326, H01L 21027, H01J 302

Patent

active

060519177

ABSTRACT:
Electron guns are disclosed that produce low-brightness and high-emittance electron beams that are suitable for use in an electron-beam reduction-lithography apparatus. A preferred embodiment comprises a cathode, a Wehnelt electrode, an anode, and at least one control electrode placed between the cathode and the anode. Each of these components defines a spherical surface all having a common center point and all thus being concentric with one another. During operation, the anode has a grounded electrical potential while the cathode and the Wehnelt electrode each have a potential of about -100 KV. If the applied voltage to the control electrode is adjusted within a range of -99 to -90 KV, the brightness can be controlled to within a range of 1.times.10.sup.3 to 2.times.10.sup.4 A/cm.sup.2.sr.

REFERENCES:
patent: 3903450 (1975-09-01), Forbess et al.
Abstract of the Proceedings of the 40th International Conference on Electron, Ion and Proton Beam Technology, held May 28-31, 1996, Atlanta, Georgia.
Cutler et al., "Thermal Velocity Effects in Electron Guns," Proceedings of the IRE, pp. 307-314, Mar. 1955.

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