Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1985-06-13
1988-03-15
Church, Craig E.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
219121EA, 219121EB, 219121ER, 250398, 250400, 2504922, 373 14, G01K 108, G21K 108, H01J 314, H01J 322
Patent
active
047315377
ABSTRACT:
An electron beam gun generates an electron beam directed at a target. The gun comprises electrodes for creating an electric field along the direction of beam travel and focusing coils for creating a magnetic field along the direction of beam travel. The electrodes include a plurality of members each having a beam-shaping aperture therein for passage of the beam substantially without interception of the electrons in the beam. The electrodes and focusing coils are disposed for accelerating electrons in the beam in non-parallel paths through the beam-shaping apertures and for converging the electrons in the beam in at least one cross-sectional dimension of the beam to minimize that dimension at the target.
REFERENCES:
patent: 2968723 (1961-01-01), Steigerwald
patent: 3347701 (1967-10-01), Yamagishi et al.
patent: 3814829 (1974-06-01), Movchan et al.
patent: 4058667 (1977-11-01), Forsen
patent: 4382186 (1983-05-01), Denholm
Fletcher P. Michael
Williams Kenneth E.
Church Craig E.
Eslinger Lewis H.
Grigsby T. N.
Sony Corporation
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