Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Patent
1998-08-11
2000-08-22
Le, Que T.
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
250548, 2502081, G01N 2186
Patent
active
061076376
ABSTRACT:
An electronic beam type exposure or inspection or measurement apparatus and method including an electron optical system, an electron beam image detection optical system for detecting a secondary electron beam image generated from an inspected object by electron beams irradiated from the electron optical system, and an optical height detection apparatus for optically detecting a height of a surface in an area on the inspected object. A focus controller is provided for calculating a focus control current or a focus control voltage based on a correction parameter between a height of a surface on the inspected object and a focus control current or a focus control voltage and supplying the same to an objective lens of the electron optical system in such a manner that an electron beam is focused on the inspected object in a properly- focused state. A deflection controller is provided for correcting an image distortion containing a magnification error of an electron beam image caused on the basis of the focus control, and an image processor is provided for inspecting or measuring a pattern formed on the inspected object based on a secondary electron beam image.
REFERENCES:
patent: 5415515 (1995-05-01), Kawashima
Hiroi Takashi
Shinada Hiroyuki
Tanaka Maki
Usami Yasutsugu
Watanabe Masahiro
Hitachi , Ltd.
Le Que T.
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