Boots – shoes – and leggings
Patent
1990-02-08
1993-05-11
Cosimano, Edward R.
Boots, shoes, and leggings
2504922, G06F 1520
Patent
active
052106969
ABSTRACT:
An electron beam exposure data processing method includes the steps of inputting exposure data relating to a pattern to be written, and determining whether or not the pattern should be subjected to a framing process. The method further includes performing the framing process when it is determined that the pattern should be subjected to the framing process so that the pattern is partitioned into a frame pattern and an inner pattern surrounded by the frame pattern, reducing the inner pattern by a reduction rate to thereby generate a reduced inner pattern, and determining an exposure dose for the frame pattern and an exposure dose for the reduced inner pattern. There are also provided an electron beam exposure method which employs the electron beam exposure data processing method and an apparatus implementing the same.
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Cosimano Edward R.
Fujitsu Limited
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