Electron beam exposure apparatus employing blanking aperture arr

Details Electron beam exposure apparatus employing blanking aperture arr Electron beam exposure apparatus employing blanking aperture arr

1993-07-23

1994-10-25

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

25049222, 25049223, H01J 3730

Patent

active

053592026

ABSTRACT:
An electron beam exposure apparatus is provided with an electron gun emitting an electron beam, a blanking aperture array including a plurality of two-dimensionally arranged blanking apertures for selectively deflecting the electron beam passing through the blanking apertures in a predetermined direction so as to shape the electron beam into a plurality of electron beams, a deflection device for regularly deflecting the electron beams passed through the blanking aperture array, and an electron beam controller for controlling the electron beams passed through the blanking aperture array so as to irradiate and expose an object surface. The electron gun has a needle shaped chip which comprises a pair of sloping surfaces which are <100> faces, and a vertex portion connecting the sloping surfaces and forming an inverted V-shape at a tip end of the needle shaped chip when viewed in a direction in which the vertex portion extends.

REFERENCES:
patent: 4742234 (1988-05-01), Feldman et al.
patent: 5260579 (1993-11-01), Yasuda et al.

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