Electron beam exposure apparatus, electron beam exposure...

Details Electron beam exposure apparatus, electron beam exposure... Electron beam exposure apparatus, electron beam exposure...

2005-07-12

2005-07-12

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

C250S39600R, C250S398000, C716S030000

Reexamination Certificate

active

06917045

ABSTRACT:
An electron beam exposure apparatus for controlling deflection timing of an electron beam with high precision, including: a blanking-electrode array having a deflecting electrode for deflecting an electron beam; a deflection timing control section for outputting the control signal for controlling the blanking-electrode array; a load circuit, of which the impedance is the same as that of the blanking-electrode array, where the wire length between the deflection timing control section and the load circuit is shorter than the wire length between the deflection timing control section and the deflecting electrode of the blanking-electrode array; and a switching section, connecting with the deflection timing control section, the blanking-electrode array, and the load circuit, for switching the destination of the control signal output from the deflection timing control section between the blanking-electrode array and the load circuit.

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