Electric lamp and discharge devices – With positive or negative ion acceleration – Supplying ionizable material
Patent
1994-09-07
1996-07-23
Horabik, Michael
Electric lamp and discharge devices
With positive or negative ion acceleration
Supplying ionizable material
31323131, 250423R, H05H 116
Patent
active
055392741
ABSTRACT:
An electron beam excited plasma system is provided with a first auxiliary electrode for initial discharge, an anode having an opening, a cathode, having an opening and located between the anode and the first auxiliary electrode, for producing an initial discharge between the first auxiliary electrode and the cathode, and for producing a plasma-generating discharge between the anode and the cathode, a second auxiliary electrode, having an opening and located between the cathode and the anode, for facilitating the generation of the discharge plasma between the cathode and the anode, a gas supply device for supplying a discharge plasma-generating gas into the region between the cathode and the anode, and magnetic field generator for generating a magnetic field and for applying this magnetic field to the region between the cathode and the anode, such that a cusp magnetic field is generated in the vicinity of the cathode.
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Araki Youichi
Mochizuki Shuji
Nagaseki Kazuya
Horabik Michael
Richardson Lawrence O.
Tokyo Electron Limited
Tokyo Electron Yamanashi Limited
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