Electron beam excitation ion source

Details Electron beam excitation ion source Electron beam excitation ion source

1990-02-16

1992-02-18

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

31511121, 31511131, 31323131, 250423R, H01J 2702

Patent

active

050897470

ABSTRACT:
An electron beam excitation ion source includes a housing having an ion generation chamber therein, a port for supplying a discharge gas to the ion generation chamber, a porous electrode for supplying accelerated electrons to the ion generation chamber from an electron generation chamber, causing the accelerated electrons to collide against the discharge gas to generate a plasma containing ions in the ion generation chamber. The housing have an ion extraction slit port through which the ions are extracted from the ion generation chamber outside the housing. An electrode is formed around the ion extraction port, for causing a local discharge around the ion extraction port so as to guide the ions in the plasma to the ion extraction port.

REFERENCES:
patent: 3178604 (1965-04-01), Eklund
patent: 3448315 (1969-06-01), Hirsch et al.
patent: 3924134 (1975-12-01), Uman et al.
patent: 4691109 (1987-09-01), Magee et al.
patent: 4841197 (1989-06-01), Takayama et al.

Affiliated with

Also associated with

Rating

Electron beam excitation ion source does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron beam excitation ion source, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron beam excitation ion source will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1825912