Electron beam evaporator having beam spot control

Details Electron beam evaporator having beam spot control Electron beam evaporator having beam spot control

1976-02-17

1977-12-20

Envall, Jr., R. N.

H01J 37305

Patent

active

040643522

ABSTRACT:
An electron beam evaporator employs an electron gun which projects a beam of electrons over an arcuate beam path to a crucible target for heating and evaporating the target material in use. The electron beam passes through the magnetic field supplied by a pair of pole pieces of a beam focus magnet which produces a main field transverse to the direction of the electrons to cause the beam to take the arcuate trajectory. Two pairs of auxiliary pole pieces project inwardly of the main pole pieces to provide a pair of beam focus lenses. One of the magnetic lenses is disposed on the inside of the beam path, whereas the other is disposed on the outside of the beam path to provide beam lateral focusing and defocusing lenses, respectively. The lenses are adjustable, preferably electromagnetically for controlling the beam spot size on the target crucible so that the evaporation characteristics can be optimized for a given beam power. In addition, the magnetic lenses are adjustable, preferably electromagnetically, for sweeping the position of the beam spot longitudinally and/or laterally of the crucible target.

REFERENCES:
patent: 3390222 (1968-06-01), Anderson
patent: 3420977 (1969-01-01), Hanks et al.
patent: 3896258 (1975-07-01), Hanks

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