Electron beam evaporation of transparent indium tin oxide

Details Electron beam evaporation of transparent indium tin oxide Electron beam evaporation of transparent indium tin oxide

1999-12-30

2000-11-28

Beck, Shrive

Coating processes

Direct application of electrical, magnetic, wave, or...

Ion plating or implantation

427566, 427567, 427585, 427 70, 42725532, C23C 1408

Patent

active

061532711

ABSTRACT:
A process for depositing a transparent coating of indium tin oxide on a substrate comprising providing said substrate in a partial vacuum environment and conducting electron beam evaporation of tin oxide doped indium oxide granules while operating an ion source providing oxygen adjacent said substrate until a coating of indium tin oxide is deposited on at least a portion of said substrate.

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