Electron-beam evaporation apparatus

Details Electron-beam evaporation apparatus Electron-beam evaporation apparatus

1974-05-17

1976-04-06

Kaplan, Morris

Electric heating

Metal heating

By arc

118 491, 324 33, C23C 1312

Patent

active

039491870

ABSTRACT:
An apparatus for electron-beam evaporation comprises a holding structure or support for the substance to be evaporated arranged alongside a hot cathode. A focusing and accelerating electrode is located adjacent the hot cathode and acts on the electrons emitted thereby. Means are provided for generating a magnetic field in the electron flow path in order to deviate the electrons to the substance. An ion-collecting electrode is located adjacent the hot cathode for collecting the ions formed in the vapor beam during the evaporation. The substance to be evaporated, the means for producing the electron beam and the ion-collecting electrode are all arranged in order one after the other in the magnetic field.

REFERENCES:
patent: 3046936 (1962-07-01), Simons, Jr.
patent: 3390249 (1968-06-01), Hanks
patent: 3651781 (1972-03-01), Brill et al.
patent: 3690635 (1972-09-01), Harker et al.
patent: 3756193 (1973-09-01), Carmichael et al.
Research Development, "Gas-Scattering and Ion Plating Deposition Methods" Kennedy et al., Vol. 22, No. 11, pp. 40-44.

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