Electron beam drilling apparatus

Details Electron beam drilling apparatus Electron beam drilling apparatus

1982-06-11

1984-08-21

Albritton, C. L.

Electric heating

Metal heating

By arc

219121EU, 219121EW, 219121EX, B23K 2700

Patent

active

044671709

ABSTRACT:
An electron beam drilling apparatus for drilling a number of holes in a substrate by an electron beam is disclosed. The holes are drilled at a high speed by scanning the electron beam along a direction perpendicular to the direction of movement of the workpiece while the workpiece is moved at a high speed. A drilling position error due to the high speed movement of the workpiece is corrected by controlling an electron beam deflection unit and an electron beam generator.

REFERENCES:
patent: 3404254 (1968-10-01), Jones
patent: 3644700 (1972-02-01), Krupper et al.
patent: 3894271 (1975-07-01), Pfeiffer et al.
patent: 4145597 (1979-03-01), Yasuda
patent: 4328411 (1982-05-01), Haller et al.

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