Electron-beam device and semiconductor device for use in such an

Electric lamp and discharge devices – Cathode ray tube – Ray generating or control

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313446, 357 13, H01J 2904

Patent

active

046820744

ABSTRACT:
A device for recording or displaying images or for electron lithographic or electron microscopic uses, comprising in an evacuated envelope (1) a target (7) on which at least one electron beam (6) is focussed. This beam is generated by means of a semiconductor device (10) which comprises an electrically insulating layer (42) having an aperture (38) through which the beam passes. The layer carries at least four beam-forming electrodes (43 through 50) which are situated at regular intervals around the aperture (38). Each of the electrodes has such a potential that an n-pole field or a combination of n-pole fields is generated, where n is an even integer from 4 through 16. A suitable choice of the n-pole field will make it possible to impart substantially any desired shape to the beam (6) and thus the focus on the target.

REFERENCES:
patent: 4147953 (1979-04-01), Esteron
patent: 4259678 (1981-03-01), van Gorkom et al.
patent: 4303930 (1981-12-01), van Gorkom et al.
patent: 4370797 (1983-02-01), van Gorkom et al.
patent: 4574216 (1986-03-01), Hoeberechts et al.

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