Electron beam detector, scanning type electron microscope,...

Details Electron beam detector, scanning type electron microscope,... Electron beam detector, scanning type electron microscope,...

2005-03-01

2005-03-01

Lee, John R. (Department: 2881)

Radiant energy

Source with charged plate-type detector

C250S310000, C250S311000, C250S372000, C250S399000, C250S370110, C257S290000, C257S077000

Reexamination Certificate

active

06861650

ABSTRACT:
In an electron beam detector, a light guide optically couples a fluorescence emitting surface of the compound semiconductor substrate to a light incident surface of the photodetector, and physically connects the compound semiconductor substrate with the photodetector, thereby integrating the compound semiconductor substrate with the photodetector. When the compound semiconductor substrate converts incident electrons to fluorescent light, the light guide guides the fluorescent light to the photodetector, and the photodetector detects the fluorescent light, thereby detecting the incident electrons.

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