Electron-beam coating of very broad strips

Details Electron-beam coating of very broad strips Electron-beam coating of very broad strips

1983-07-29

1985-08-06

Smith, John D.

Coating apparatus

Gas or vapor deposition

Running length work

118726, 219121EE, 219121EV, 427 42, C23C 1312

Patent

active

045328889

ABSTRACT:
Electron-beam (EB) coating of broad strips with improved film quality, and without undue scattering and deflection of the electron beam at long beam paths is accomplished with a shielding mantle, placed between the EB gun and the evaporation crucible, providing vacuum-tight shielding of the beam path from the coating chamber.

REFERENCES:
patent: 3046936 (1962-07-01), Simons, Jr.
patent: 3814829 (1974-06-01), Mouchan et al.
patent: 3931490 (1976-01-01), Grothe et al.
patent: 4327273 (1982-04-01), Kita et al.
patent: 4398079 (1983-08-01), Dard et al.

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