Electron beam applying apparatus and drawing apparatus

Details Electron beam applying apparatus and drawing apparatus Electron beam applying apparatus and drawing apparatus

2011-04-19

2011-04-19

Hindi, Nabil Z (Department: 2627)

Dynamic information storage or retrieval

Specific detail of information handling portion of system

Radiation beam modification of or by storage medium

Reexamination Certificate

active

07929396

ABSTRACT:
An electron beam applying apparatus includes: a thermal field emission type electron source emitting an electron beam; an electrostatic lens disposed immediately below the electron source and acting as a condensing electrode for condensing the electron beam in a first angular aperture emitted by the electron source in a second angular aperture smaller than the first angular aperture; a condenser lens disposed on a downstream side of the electrostatic lens and condensing the electron beam condensed in the second aperture angel by the electrostatic lens in a crossover point; and an objective lens disposed on a downstream side of the condenser lens and condensing the electron beam condensed in the crossover point by the condenser lens on the surface of the material.

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