Electron beam apparatus including a plurality of ion pump blocks

Details Electron beam apparatus including a plurality of ion pump blocks Electron beam apparatus including a plurality of ion pump blocks

1989-08-15

1991-06-04

DeMeo, Palmer C.

Electric lamp and discharge devices

With evacuating pump

313336, 315 85, H01J 716

Patent

active

050217020

ABSTRACT:
An electron beam apparatus has a cylindrical chamber, ion pump exhaust zones arranged in a substantially ring-like array, and an electron gun located on the center axis of the ring-like array, thereby minimizing the distance between the exhaust zone of an ion pump and the electron gun for generating an electron beam. Since the ion pump exhaust zones are located immediately next to the electron gun, it is therefore possible to achieve substantially the same vacuum level at the location of the electron gun as that at the ion pump per se.

REFERENCES:
patent: 3228589 (1966-01-01), Kearns
patent: 3376455 (1968-04-01), Jepson
patent: 3382388 (1968-05-01), Henderson et al.
patent: 3588563 (1971-06-01), Schmidt
patent: 3631280 (1971-12-01), Levin et al.
patent: 3866077 (1975-02-01), Baker et al.
patent: 4890029 (1989-12-01), Miyoshi et al.
"Understanding and Using Field Emission Sources", by J. F. Hainfeld, Scanning Electron Microscopy, ITT Research Institute, vol. I; pp. 591-604, Mar. 1977.

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