Electron beam apparatus having electron analyzer and method...

Radiant energy – With charged particle beam deflection or focussing – With target means

Reexamination Certificate

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C250S311000

Reexamination Certificate

active

07030389

ABSTRACT:
An electron beam apparatus having an electron analyzer is achieved which can control the illumination lens system by feedback without adversely affecting the imaging action even if a specimen is positioned within the magnetic field of the objective lens. The apparatus has an energy shift control module for controlling energy shift. On receiving instructions about setting of energy shift from the CPU, the control module issues an instruction for shifting the accelerating voltage to a specified value to an accelerating-voltage control module. The control module also sends information about the energy shift to an energy shift feedback control module, which calculates the feedback value and supplies information about corrections of lenses and deflection coils to a TEM optics control module. The feedback value is multiplied by a corrective coefficient that can be calibrated.

REFERENCES:
patent: 4851768 (1989-07-01), Yoshizawa et al.
patent: 5300775 (1994-04-01), Van der Mast
patent: 5578823 (1996-11-01), Taniguchi
patent: 5798524 (1998-08-01), Kundmann et al.
patent: 11-086771 (1999-03-01), None
patent: 2000-268766 (2000-02-01), None

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