Electron beam apparatus comprising an anode which is included in

Details Electron beam apparatus comprising an anode which is included in Electron beam apparatus comprising an anode which is included in

1987-12-07

1989-01-17

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

313237, 313268, H01J 314

Patent

active

047989572

ABSTRACT:
A cathode (32), a Wehnelt cylinder (2, 36) and an anode (3, 51) are accommodated in an integrated unit in an electron beam apparatus. Extremely accurate positioning of a Wehnelt bore and an anode bore with respect to one another can be achieved in such an assembled unit which is mounted in the apparatus so as to be removable as one unit. An exactly defined distance between the Wehnelt cylinder and the anode can also be adjusted. As a result of the exact mutual positioning, the anode bore can be chosen to be so small that it can also act as a beam aperture so that a smaller electron-optical object as well as a substantial reduction of the mutual electron interaction in the beam is achieved.

REFERENCES:
patent: 2916649 (1959-12-01), Levin
patent: 3349283 (1967-10-01), Krefft
patent: 3359447 (1967-12-01), Tsuyama et al.
patent: 3601649 (1971-08-01), Steigerwald
patent: 3652821 (1972-03-01), Dietrich et al.
patent: 4057746 (1977-11-01), Dumonte
patent: 4396861 (1983-08-01), Hoffmeister et al.

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