Electron beam apparatus and method for production of its...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C250S310000, C250S311000

Reexamination Certificate

active

11450382

ABSTRACT:
A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.

REFERENCES:
patent: 6300755 (2001-10-01), Elmer et al.
patent: 7030376 (2006-04-01), Inanobe et al.
patent: 2002/0178562 (2002-12-01), Aoki et al.
patent: 61-059825 (1986-03-01), None
patent: 61059825 (1986-03-01), None
patent: 11-342437 (1999-12-01), None
patent: 2001-027505 (2001-01-01), None
patent: 2002-361441 (2002-12-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Electron beam apparatus and method for production of its... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron beam apparatus and method for production of its..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron beam apparatus and method for production of its... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3790848

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.