Electron beam apparatus and method for driving the same

Details Electron beam apparatus and method for driving the same Electron beam apparatus and method for driving the same

1991-09-24

1993-08-03

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

With target means

250396R, H01J 3730, H01J 37147

Patent

active

052331962

ABSTRACT:
An electron beam apparatus for applying an electron beam from an electron source onto a target plane is characterized by comprising one sheet of electrode disposed between said electron source for emitting the electron beam in parallel or substantially parallel and a target arrangement position, and a power source for supplying a desired voltage to said electrode.

REFERENCES:
patent: 3581151 (1971-05-01), Boyle et al.
patent: 4506284 (1985-03-01), Shannon
patent: 4516146 (1985-05-01), Shannon et al.
patent: 4833507 (1989-05-01), Shimizu et al.
patent: 4891552 (1990-01-01), Moriyama
patent: 5059804 (1991-10-01), Fink et al.
patent: 5155412 (1992-10-01), Chang et al.

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