Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1979-10-03
1982-02-09
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250398, H01J 3700
Patent
active
043151523
ABSTRACT:
In an electron-beam probe instrument such as a scanning electron microscope in which the electron gun employs a field-emission cathode the condenser lens is of the `snorkel` design. The term `snorkel` is used to denote a single-pole magnetic lens in which the pole-piece has an axially extending nose portion. The lens is positioned so that the cathode region is immersed in the radial field at the nose of the lens. Preferably the lens is placed closely behind the cathode but outside the vacuum envelope.
REFERENCES:
patent: 3707628 (1972-12-01), Bassett et al.
patent: 3812365 (1974-05-01), LePoole
patent: 3870891 (1975-03-01), Mulvey
patent: 3924126 (1975-12-01), Anderson et al.
Anderson Bruce C.
National Research Development Corporation
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