Electron beam apparatus

Details Electron beam apparatus Electron beam apparatus

1980-12-16

1984-01-03

Smith, Alfred E.

Radiant energy

With charged particle beam deflection or focussing

With detector

2504942, H01J 308, H01J 312

Patent

active

044244487

ABSTRACT:
An electron beam apparatus comprises an electron gun having a cathode consisting of single-crystal lanthanum hexaboride and a plurality of electron lenses for projecting the cross-over image of an electron beam emitted from the electron gun as a reduced-scale image onto a sample. It further comprises a circuit for measuring the brightness and shape of the cross-over image projected onto the sample and the emission pattern of the electron beam emitted from the electron gun, and a circuit for applying a bias voltage, with which the cross-over image has a desired brightness and is round and the emission pattern is anisotropic, to the electron gun.

REFERENCES:
patent: 3838313 (1974-09-01), Anderson
patent: 4000440 (1976-12-01), Hall et al.
Proceedings Microcircuit Engineering '79, "Comparitive Measurements on the High Brightness LaB.sub.6 Electron Gun Using Sintered and Single Crystal Cathode Materials"by F. J. Hohn et al., Sep. 1979.

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