Electron beam and x-ray resists

Details Electron beam and x-ray resists Electron beam and x-ray resists

1986-12-29

1989-09-19

Schofer, Joseph L.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Mixing of two or more solid polymers; mixing of solid...

525 61, C08F 832

Patent

active

048682411

ABSTRACT:
Polymers are disclosed comprising a poly(vinyl alcohol) backbone with the following groups or combination of groups bound to the backbone:

REFERENCES:
patent: 3296225 (1967-01-01), Worrall
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patent: 3933746 (1976-01-01), Steele
patent: 4061829 (1977-12-01), Taylor
patent: 4080346 (1978-03-01), Bedell
patent: 4301231 (1981-11-01), Atarashi et al.
patent: 4559389 (1986-12-01), Hatada et al.
patent: 4639500 (1987-01-01), Kubo
patent: 4670506 (1987-06-01), Goldenberg et al.

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