Radiant energy – Electron energy analysis
Patent
1997-12-09
1999-10-19
Berman, Jack I.
Radiant energy
Electron energy analysis
250396ML, H01J 4946
Patent
active
059693541
ABSTRACT:
A charged-particle analyzer in which a solenoid or other means set up a generally axial magnetic field in a drift region. Meshes of magnetically permeable material are set at ends of the drift region to terminate the magnetic field. Charged particles, such as electrons, are incident upon entrance mesh at a given angle with respect to the central axis. After passing through the entrance mesh, they gyrate around the magnetic field lines, and they then exit the drift region through the exit mesh. The rotation accumulated across the drift region depends upon the energy of the incident particle, and the angle of the particle trajectory exterior of the exit mesh thus depends on the particle's energy. A charged-particle detector detects the position of the particle relative to the central axis and, hence, its energy. In one embodiment, the meshes are flat so that a uniform magnetic field is created in the drift region. In another embodiment, the meshes are curved and may act as charged-particle lenses with focal planes at the particle source and at the detector.
REFERENCES:
patent: 3822382 (1974-07-01), Koike
patent: 5583336 (1996-12-01), Kelly
Kim et al., "Construction of a new imaging bandpass analyzer for a magnetic projection photoelectron microscope," Review of Scientific Instruments, vol. 65, No. 5, May 1993, pp. 3159-3167.
Berman Jack I.
Guenzer Charles S.
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