Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Patent
1997-12-18
2000-03-07
Jones, Deborah
Active solid-state devices (e.g., transistors, solid-state diode
With means to control surface effects
Insulating coating
257650, 257751, 257763, 257765, 257770, 257771, H01L 2358
Patent
active
060344202
ABSTRACT:
Spacings between metal features are gap filled with HSQ without degradation of the electromigration resistance by depositing a conformal dielectric liner encapsulating the metal features before depositing the HSQ gap fill layer. Embodiments include depositing a conformal layer of a high density plasma oxide by high density plasma chemical deposition to a thickness of about 100 .ANG. to about 1,000 .ANG..
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Advanced Micro Devices , Inc.
Jones Deborah
Lam Cathy F.
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