Electromigration method for making stained glass photomasks

Glass manufacturing – Processes – With chemically reactive treatment of glass preform

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65 301, 65 32, 65 601, 65 604, 204130, 427 12, 427 38, 430330, C03C 1500, C03C 1700

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active

RE0312207

ABSTRACT:
Glass photomasks having a stained pattern within the glass for use in photolithographic processes are made by exposing and developing a photoresist on a sheet of glass and subsequently migrating stain-producing ions, such as silver and/or copper, into the surface of the glass under the influence of an electric field and moderately elevated temperatures.

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