Electromechanical transducer strain sensor arrangement and const

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system

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73766, 7386263, 73517R, G01L 118

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active

045220727

ABSTRACT:
A miniature, solid state, cantilever beam accelerometer is constructed with an arrangement of strain sensing elements which provides for simpler temperature compensation, dual-axis acceleration measurement, and the capability of correcting for nonlinearity in a strain sensing element. Temperature compensation is facilitated by locating two strain sensing elements on the cantilever beam and two on the main body of the accelerometer and connecting the four elements in a Wheatstone bridge. Instead of a single bridge, two half bridges may be formed to allow for independent adjustment of each side of the Wheatstone bridge. Independent adjustment is also possible by using two full bridges with all strain sensing elements oriented in the same direction. If the elements of one bridge are oriented in an orthogonal direction, the accelerometer is capable of measuring both on-axis and off-axis accelerations. The strain sensing elements may be FET's or resistors and may be deposited upon, or formed integrally with, the accelerometer.

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