Electromechanical resonator and manufacturing method thereof

Details Electromechanical resonator and manufacturing method thereof Electromechanical resonator and manufacturing method thereof

2011-03-15

2011-03-15

Pascal, Robert (Department: 2817)

Oscillators

Solid state active element oscillator

Transistors

C331S154000, C333S187000, C333S197000

Reexamination Certificate

active

07907025

ABSTRACT:
An electromechanical resonator includes a resonator portion which includes a fixed electrode and an oscillator formed separately from the fixed electrode with a gap. The gap has a first gap region and a second gap region which are arranged in a thickness direction of the fixed electrode. The first gap region is different in width from the second gap region.

REFERENCES:
patent: 6940370 (2005-09-01), Bircumshaw et al.
patent: 2008/0150647 (2008-06-01), Yang et al.
patent: 06-310029 (1994-04-01), None
Mustafa U. Demirci and Clark T.-C. Nguyen, Higher-Mode Free-Free Beam Micromechanical Resonators, Proceedings, May 5-8, 2003, pp. 810-818, USA.

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