Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2008-03-17
2010-10-19
Thompson, Timothy J (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000, C359S223100, C359S224200
Reexamination Certificate
active
07817332
ABSTRACT:
An electromechanical dynamic force profile articulating mechanism for recovering or emulating true parallel plate capacitor actuation behaviors from deformable membranes used in MEMS systems. The curved deformation of flexible membranes causes their MEMS behavior to deviate from known interactions between rigid plates that maintain geometric parallelism during ponderomotive actuation. The present invention teaches three methods for reacquiring parallel plate behavior: superaddition or in situ integration of a rigid region within or upon the deformable MEMS membrane; creation of isodyne regions to secure parallelism by altering the force profile upon the membrane by introducing tuned and shaped voids within the conductive region associated with the membrane; and a hybrid composite approach wherein the conductive region is deposited after deposition of a raised rigid zone, thereby emulating isodyne behavior due to the increased inter-conductor distance in the vicinity of the rigid zone, in conjunction with rigidity benefits stemming directly from said zone.
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International Search Report dated Oct. 12, 2007; Application No. PCT/US06/34193, 10 pages.
Fulbright & Jaworski L.L.P.
Rambus International Ltd.
Thompson Timothy J
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