Electromechanical device with optical function separated...

Details Electromechanical device with optical function separated... Electromechanical device with optical function separated...

2007-07-02

2009-12-08

Spector, David N (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S292000, C359S295000

Reexamination Certificate

active

07630121

ABSTRACT:
In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.

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