Electromechanical device with optical function separated...

Details Electromechanical device with optical function separated... Electromechanical device with optical function separated...

2011-05-17

2011-05-17

Lester, Evelyn A. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224200, C359S291000, C359S292000, C359S295000, C359S298000, C359S318000, C345S085000, C345S108000

Reexamination Certificate

active

07944599

ABSTRACT:
A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

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