Electromagnetic radiation sensor and method for fabricating...

Details Electromagnetic radiation sensor and method for fabricating... Electromagnetic radiation sensor and method for fabricating...

2008-04-29

2008-04-29

Hannaher, Constantine (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

11086909

ABSTRACT:
An SiO2layer (3), a Ti layer (4), a Pt layer (5), a PLZT layer (6) and an IrO2layer (7) are formed sequentially on an Si substrate (2). The IrO2layer (7) functioning as a top electrode has a thickness of about 100 nm. Since the IrO2layer (7) has conductivity lower than that of Pt or the like conventionally used as a top electrode and a skin depth deeper than that of Pt or the like, sufficient sensitivity can be attained by a thickness of about 100 nm.

REFERENCES:
patent: 4319485 (1982-03-01), Terada et al.
patent: 5443030 (1995-08-01), Ishihara et al.
patent: 5561307 (1996-10-01), Mihara et al.
patent: 5576928 (1996-11-01), Summerfelt et al.
patent: 5743006 (1998-04-01), Beratan
patent: 5757061 (1998-05-01), Satoh et al.
patent: 5767560 (1998-06-01), Gofuku
patent: 5986301 (1999-11-01), Fukushima et al.
patent: 6087651 (2000-07-01), Koyama
patent: 6300612 (2001-10-01), Yu
patent: 6399946 (2002-06-01), Hobbs
patent: 6914279 (2005-07-01), Lu et al.
patent: 2003/0134136 (2003-07-01), Biscotto et al.
patent: 2003/0201164 (2003-10-01), Johnson et al.
patent: 0 661 244 (1995-07-01), None
patent: 55-91101 (1980-07-01), None
patent: 04-266017 (1992-09-01), None
patent: 05-13802 (1993-01-01), None
patent: 5-102499 (1993-04-01), None
patent: 05-145108 (1993-06-01), None
patent: 05-145109 (1993-06-01), None
patent: 5-206382 (1993-08-01), None
patent: 7-215762 (1995-08-01), None
patent: 8-340085 (1996-12-01), None
patent: 10-27888 (1998-01-01), None
patent: 10-332481 (1998-12-01), None
patent: 11-37838 (1999-02-01), None
patent: 2000-55746 (2000-02-01), None
patent: 2000-228516 (2000-08-01), None
patent: 2001-304955 (2001-10-01), None
patent: 2002-502120 (2002-01-01), None
patent: 2002-90228 (2002-03-01), None
patent: WO 96/10263 (1996-04-01), None
Japanese Office Action dated Oct. 25, 2006, issued in corresponding Japanese Application No. 2004-569107.

Affiliated with

Also associated with

Rating

Electromagnetic radiation sensor and method for fabricating... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electromagnetic radiation sensor and method for fabricating..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electromagnetic radiation sensor and method for fabricating... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3912068