Coherent light generators – Particular active media – Gas
Reexamination Certificate
2005-10-18
2005-10-18
Harvey, Min Sun (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S057000, C372S034000, C372S076000
Reexamination Certificate
active
06956885
ABSTRACT:
An extreme ultraviolet radiation generator is disclosed in which Xenon gas is continuously ejected from a high pressure nozzle into a low pressure chamber to generate Xenon atom clusters which are irradiated with a high repetition rate pulsed laser to form a plasma and yield quasi-continuous EUV generation. The nozzle has a beveled outer rim to enable the focus point of the laser light to be brought close to the nozzle. The nozzle is cooled to a temperature at which background Xenon gas condenses onto the nozzle forming a protective layer. A gas compressor serves to recirculate the Xenon gas and batch purification triggered by a mass spectrometer monitoring gas purity may be periodically applied.
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CLEO 2002, CTh013 Simple and Efficient Pumping Scheme for Side Pumped Diode Lasers.
Allwood Daniel A.
Klug David R.
Mercer Ian P.
Taylor Alan G.
Flores-Ruiz Delma R.
Harvey Min Sun
Powerlase Limited
Reinhart Boerner Van Deuren s.c.
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