Electromagnetic radiation detector

Details Electromagnetic radiation detector Electromagnetic radiation detector

1996-10-25

1999-07-27

Porta, David P.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

2503361, 250332, G02F 100

Patent

active

059294400

ABSTRACT:
An electromagnetic radiation (EMR) responsive detector includes an array of multi-layered cantilevers with each cantilever having at least a first layer for absorbing EMR signals and a second layer for reflecting light incident on the second layer. Each cantilever is formed so it can absorb EMR which gets converted into heat which then causes the cantilever to bend proportionately to the amount of EMR energy it absorbs. The amount of EMR absorbed by each cantilever of the array is optically read-out (sensed) by illuminating the cantilevers of the array and sensing the light reflected from each cantilever. Various schemes for projecting light onto the array and sensing the reflected light are disclosed. The optical read-out of the array eliminates the need for electronic read-out circuitry and accessing wires to be formed on the array. The simplicity of the structure of the array elements and eliminating the need for read-out wiring and electronics permits the fabrication of a detector array with extremely high packing density.

REFERENCES:
patent: 3415712 (1968-12-01), Barker, Jr.
patent: 3896309 (1975-07-01), Halsor et al.
patent: 4762426 (1988-08-01), Foss
Barnes et al, "Photothermal Spectroscopy with Femtojoule Sensitivity Using a Micromechanical Device", Nature, 372(3), Nov. 1994, pp. 79-81.

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