Electromagnetic beam directing means-sample analysis system stag

Details Electromagnetic beam directing means-sample analysis system stag Electromagnetic beam directing means-sample analysis system stag

1996-10-04

1998-01-06

Font, Frank G.

Optics: measuring and testing

By polarized light examination

356369, G01J 400

Patent

active

057060878

ABSTRACT:
Disclosed is an electromagnetic beam directing means for use with sample analysis systems, such as reflectometers, ellipsometers and polarimeters and the like, use of which facilitates investigation of sample systems which are not mounted to a sample analysis system sample system supporting stage. The present invention eliminates the requirement of extensive sample analysis system component realignment when alternatingly performing analysis of sample systems mounted upon, and mounted other than upon, a sample analysis system sample system supporting stage.

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patent: 5166752 (1992-11-01), Spanier et al.
patent: 5521706 (1996-05-01), Green et al.

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