Electromagnetic alignment and scanning apparatus

Details Electromagnetic alignment and scanning apparatus Electromagnetic alignment and scanning apparatus

2005-11-29

2005-11-29

Ro, Bentsu (Department: 2837)

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

C318S676000, C414S935000

Reexamination Certificate

active

06969966

ABSTRACT:
In a scanning exposure method, a mask stage that holds a mask is moved in a scanning direction by a first electromagnetic driver having a first portion coupled to the mask stage, and a second portion. A position of the mask stage is detected by a position detector that cooperates with a reflective portion of the mask stage that is positioned along the scanning direction. A counter weight having a bearing and at least one beam extending along the scanning direction moves in a direction opposite to a movement direction of the mask stage in response to a reaction force generated by movement of the mask stage by the first electromagnetic driver. The counter weight preferably is heavier than the mask stage, and a length of the at least one beam along the scanning direction preferably is longer than a length of the reflective portion along the scanning direction.

REFERENCES:
patent: RE27289 (1972-02-01), Sawyer
patent: RE27436 (1972-07-01), Sawyer
patent: 3789285 (1974-01-01), Nishizawa
patent: 3889164 (1975-06-01), Nishizawa et al.
patent: 3935486 (1976-01-01), Nagashima
patent: 4019109 (1977-04-01), McCoy et al.
patent: 4087729 (1978-05-01), Yamazaki et al.
patent: 4129291 (1978-12-01), Kato et al.
patent: 4234175 (1980-11-01), Sato et al.
patent: 4392642 (1983-07-01), Chitayat
patent: 4409860 (1983-10-01), Moriyama et al.
patent: 4425508 (1984-01-01), Lewis, Jr. et al.
patent: 4443743 (1984-04-01), Forys et al.
patent: 4485339 (1984-11-01), Trost
patent: 4492356 (1985-01-01), Taniguchi et al.
patent: 4504144 (1985-03-01), Trost
patent: 4506204 (1985-03-01), Galburt
patent: 4506205 (1985-03-01), Trost et al.
patent: 4507597 (1985-03-01), Trost
patent: 4514858 (1985-04-01), Novak
patent: 4516253 (1985-05-01), Novak
patent: 4525659 (1985-06-01), Imahashi et al.
patent: 4575942 (1986-03-01), Moriyama
patent: 4615515 (1986-10-01), Suzuta et al.
patent: 4628238 (1986-12-01), Smulders et al.
patent: 4630942 (1986-12-01), Tsumaki et al.
patent: 4641071 (1987-02-01), Tazawa et al.
patent: 4648723 (1987-03-01), Sugiyama et al.
patent: 4648724 (1987-03-01), Sugiyama et al.
patent: 4653408 (1987-03-01), Nagashima et al.
patent: 4654571 (1987-03-01), Hinds
patent: 4667139 (1987-05-01), Hirai et al.
patent: 4675891 (1987-06-01), Plessis et al.
patent: 4676492 (1987-06-01), Shamir
patent: 4677651 (1987-06-01), Hartl et al.
patent: 4684315 (1987-08-01), Sugishima et al.
patent: 4687980 (1987-08-01), Phillips et al.
patent: 4698575 (1987-10-01), Bouwer
patent: 4708465 (1987-11-01), Isohata et al.
patent: 4723086 (1988-02-01), Leibovich et al.
patent: 4742286 (1988-05-01), Phillips
patent: 4744675 (1988-05-01), Sakino et al.
patent: 4750721 (1988-06-01), Sasada
patent: 4770531 (1988-09-01), Tanaka et al.
patent: 4803712 (1989-02-01), Kembo et al.
patent: 4812725 (1989-03-01), Chitayat
patent: 4817930 (1989-04-01), Van Deuren
patent: 4870668 (1989-09-01), Frankel et al.
patent: 4879482 (1989-11-01), Murofushi
patent: 4887804 (1989-12-01), Ohtsuka
patent: 4916340 (1990-04-01), Negishi
patent: 4952858 (1990-08-01), Galburt
patent: 4993696 (1991-02-01), Furukawa et al.
patent: 5022619 (1991-06-01), Mamada
patent: 5031547 (1991-07-01), Hirose
patent: 5040431 (1991-08-01), Sakino et al.
patent: 5059090 (1991-10-01), Bobroff et al.
patent: 5120034 (1992-06-01), Van Engelen et al.
patent: 5150153 (1992-09-01), Franken et al.
patent: 5172160 (1992-12-01), Van Eijk et al.
patent: 5194893 (1993-03-01), Nishi
patent: 5208497 (1993-05-01), Ishii et al.
patent: 5228358 (1993-07-01), Sakino et al.
patent: 5229670 (1993-07-01), Kagawa
patent: 5241183 (1993-08-01), Kanai et al.
patent: 5243491 (1993-09-01), Van Eijk et al.
patent: 5260580 (1993-11-01), Itoh et al.
patent: 5280677 (1994-01-01), Kubo et al.
patent: 5285142 (1994-02-01), Galburt et al.
patent: 5315526 (1994-05-01), Maeda et al.
patent: 5327060 (1994-07-01), Van Engelen et al.
patent: 5338121 (1994-08-01), Kobayashi et al.
patent: 5473410 (1995-12-01), Nishi
patent: 5477304 (1995-12-01), Nishi
patent: 5504407 (1996-04-01), Wakui et al.
patent: 5528118 (1996-06-01), Lee
patent: 5715064 (1998-02-01), Lin
patent: 5721608 (1998-02-01), Taniguchi
patent: 5744924 (1998-04-01), Lee
patent: 5760564 (1998-06-01), Novak
patent: 5796469 (1998-08-01), Ebinuma
patent: 5801833 (1998-09-01), Kobayashi et al.
patent: 6002465 (1999-12-01), Korenaga
patent: 6246204 (2001-06-01), Ebihara et al.
patent: 6252370 (2001-06-01), Ebihara et al.
patent: 6255795 (2001-07-01), Ebihara et al.
patent: 6255796 (2001-07-01), Ebihara et al.
patent: 6472840 (2002-10-01), Takahashi
patent: 6538719 (2003-03-01), Takahashi et al.
patent: 6538720 (2003-03-01), Galburt et al.
patent: 6717653 (2004-04-01), Iwamoto et al.
patent: 6784978 (2004-08-01), Galburt
patent: A1-0 502 578 (1992-11-01), None
patent: 2 288 277 (1995-10-01), None
patent: 61-45988 (1986-03-01), None
patent: 63-20014 (1988-01-01), None
patent: 3-21894 (1991-01-01), None
Buckley, Jere D., et al. “Step and Scan: A Systems Overview of a New Lithography Tool”. The Perkin-Elmer Corporation, Connecticut Operations Sector, Norwalk, CT, SPIE, vol. 1088,Laser Microlithography II(1989), pp. 424-433.
Moriyama, et al., “Precision X-Y Stage with a Piezo-driven Fine-table,” The Bulletin of the Japan Society Precision Engineering, vol. 22, No. 1, pp. 13-17, Mar. 1988.
SPIE vol. 135, Developments in Semiconductor Microlithography III (1978), “A New VLSI Printer”, Thomas W. Novak, pp. 36-43.
Cobilt Model CA-3400 Automatic Projection Mask Aligner User's Manual (1980).
Micrascan II Descriptions (1993).
SEMATECH Presentation (Jul. 1993).

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