Electromagnetic alignment and scanning apparatus

Details Electromagnetic alignment and scanning apparatus Electromagnetic alignment and scanning apparatus

2005-01-18

2005-01-18

Ro, Bentsu (Department: 2837)

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

C318S597000, C318S676000

Reexamination Certificate

active

06844695

ABSTRACT:
An apparatus capable of high accuracy position and motion control utilizes one or more linear commutated motors to move a guideless stage in one long linear direction and small yaw rotation in a plane. A carrier/follower holding a single voice coil motor (VCM) is controlled to approximately follow the stage in the direction of the long linear motion. The VCM provides an electromagnetic force to move the stage for small displacements in the plane in a linear direction perpendicular to the direction of the long linear motion to ensure proper alignment. One element of the linear commutated motors is mounted on a freely suspended drive assembly frame which is moved by a reaction force to maintain the center of gravity of the apparatus. Where one linear motor is utilized, yaw correction can be achieved utilizing two VCMs.

REFERENCES:
patent: RE27289 (1972-02-01), Sawyer
patent: RE27436 (1972-07-01), Sawyer
patent: 3789285 (1974-01-01), Nishizawa
patent: 3889164 (1975-06-01), Nishizawa et al.
patent: 3935486 (1976-01-01), Nagashima
patent: 4019109 (1977-04-01), McCoy et al.
patent: 4087729 (1978-05-01), Yamazaki et al.
patent: 4129291 (1978-12-01), Kato et al.
patent: 4234175 (1980-11-01), Sato et al.
patent: 4392642 (1983-07-01), Chitayat
patent: 4409860 (1983-10-01), Moriyama et al.
patent: 4425508 (1984-01-01), Lewis, Jr. et al.
patent: 4443743 (1984-04-01), Forys et al.
patent: 4485339 (1984-11-01), Trost
patent: 4492356 (1985-01-01), Taniguchi et al.
patent: 4504144 (1985-03-01), Trost
patent: 4506204 (1985-03-01), Galburt
patent: 4506205 (1985-03-01), Trost et al.
patent: 4507597 (1985-03-01), Trost
patent: 4514858 (1985-04-01), Novak
patent: 4516253 (1985-05-01), Novak
patent: 4525659 (1985-06-01), Imahashi et al.
patent: 4575942 (1986-03-01), Moriyama
patent: 4615515 (1986-10-01), Suzuta et al.
patent: 4628238 (1986-12-01), Smulders et al.
patent: 4630942 (1986-12-01), Tsumaki et al.
patent: 4641071 (1987-02-01), Tazawa et al.
patent: 4648723 (1987-03-01), Sugiyama et al.
patent: 4648724 (1987-03-01), Sugiyama et al.
patent: 4653408 (1987-03-01), Nagashima et al.
patent: 4654571 (1987-03-01), Hinds
patent: 4667139 (1987-05-01), Hirai et al.
patent: 4675891 (1987-06-01), Plessis et al.
patent: 4676492 (1987-06-01), Shamir
patent: 4677651 (1987-06-01), Hartl et al.
patent: 4684315 (1987-08-01), Sugishima et al.
patent: 4687980 (1987-08-01), Phillips et al.
patent: 4698575 (1987-10-01), Bouwer
patent: 4708465 (1987-11-01), Isohata et al.
patent: 4723086 (1988-02-01), Leibovich et al.
patent: 4742286 (1988-05-01), Phillips
patent: 4744675 (1988-05-01), Sakino et al.
patent: 4750721 (1988-06-01), Sasada
patent: 4770531 (1988-09-01), Tanaka et al.
patent: 4803712 (1989-02-01), Kembo et al.
patent: 4812725 (1989-03-01), Chitayat
patent: 4817930 (1989-04-01), Van Deuren
patent: 4870668 (1989-09-01), Frankel et al.
patent: 4879482 (1989-11-01), Murofushi
patent: 4887804 (1989-12-01), Ohtsuka
patent: 4916340 (1990-04-01), Negishi
patent: 4952858 (1990-08-01), Galburt
patent: 4993696 (1991-02-01), Furukawa et al.
patent: 5022619 (1991-06-01), Mamada
patent: 5031547 (1991-07-01), Hirose
patent: 5040431 (1991-08-01), Sakino et al.
patent: 5059090 (1991-10-01), Bobroff et al.
patent: 5120034 (1992-06-01), Van Engelen et al.
patent: 5150153 (1992-09-01), Franken et al.
patent: 5172160 (1992-12-01), Van Eijk et al.
patent: 5194893 (1993-03-01), Nishi
patent: 5208497 (1993-05-01), Ishii et al.
patent: 5228358 (1993-07-01), Sakino et al.
patent: 5229670 (1993-07-01), Kagawa
patent: 5241183 (1993-08-01), Kanai et al.
patent: 5243491 (1993-09-01), Van Eijk et al.
patent: 5260580 (1993-11-01), Itoh et al.
patent: 5280677 (1994-01-01), Kubo et al.
patent: 5285142 (1994-02-01), Galburt et al.
patent: 5315526 (1994-05-01), Maeda et al.
patent: 5327060 (1994-07-01), Van Engelen et al.
patent: 5338121 (1994-08-01), Kobayashi et al.
patent: 5473410 (1995-12-01), Nishi
patent: 5477304 (1995-12-01), Nishi
patent: 5504407 (1996-04-01), Wakui et al.
patent: 5528118 (1996-06-01), Lee
patent: 5715064 (1998-02-01), Lin
patent: 5721608 (1998-02-01), Taniguchi
patent: 5744924 (1998-04-01), Lee
patent: 5760564 (1998-06-01), Novak
patent: 5796469 (1998-08-01), Ebinuma
patent: 5801833 (1998-09-01), Kobayashi et al.
patent: 6246204 (2001-06-01), Ebihara et al.
patent: 6252370 (2001-06-01), Ebihara et al.
patent: 6255795 (2001-07-01), Ebihara et al.
patent: 6255796 (2001-07-01), Ebihara et al.
patent: A1-0 502 578 (1992-11-01), None
patent: 2 288 277 (1995-10-01), None
patent: 61-45988 (1986-03-01), None
patent: 3-21894 (1991-01-01), None
patent: 63-20014 (1994-11-01), None
Buckley, Jere D., et al. “Step and Scan; A Systems Overview of a New Lithography Tool”, The Perkin-Elmer Corporation, Connecticut Operations Sector, Norwalk, CT, SPIE, vol. 1088,Laser Microlithography II(1989), pp. 424-433.
Moriyama, et al., “Precision X-Y Stage with a Piezo-driven Fine-table,” The Bulletin of The Japan Society Precision Engineering, vol. 22, No. 1, pp. 13-17, Mar. 1988.
SPIE vol. 135, Developments in Semiconductor Microlithography III (1978), “A VLSI Printer”, Thomas W. Novak, pp. 36-43.
Cobilt Model CA-3400 Automatic Projection Mask Aligner User's Manual (1980).
Micrascan II Descriptions (1993).
SEMATECH Presentation (Jul. 1993).

Affiliated with

Also associated with

Rating

Electromagnetic alignment and scanning apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electromagnetic alignment and scanning apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electromagnetic alignment and scanning apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3374994